High-precision imaging and laser technology

Fraunhofer IPMS has extensive experience in the development and production of highly miniaturized MEMS (Micro-Electro-Mechanical Systems) scanners. These micro scanners offer: 

• Large scanning angles and high scanning frequencies 

• long-term stability 

• High-resolution imaging with durable performance 

A recent development from the institute includes the first hybrid 2D vector scanner modules with electromagnetic drive. These allow for two-dimensional, quasi-static deflection, featuring larger mirror apertures and high vector positioning speeds. 

Micro scanner mirrors from Fraunhofer IPMS enable accurate projection and scanning of different materials and objects through spatial beam deflection via rotation and translation. Key features include: 

• High miniaturization 

• Fatigue-free SCS (single crystalline silicon) mechanics 

• Integrated position sensors 

• High scanning frequencies 

These MEMS scanners can be configured in multiple ways, allowing for a broad range of potential applications in medical imaging and therapy. 

The MEMS-based micro scanners from Fraunhofer IPMS play a critical role in various medical fields: 

• Laser therapy: Used in treatment procedures for eye diseases. 

• Endoscopy and spectroscopy: Enable high-resolution internal imaging. 

• Fluorescence microscopy: Enhances tumor detection in surgical procedures. 

By employing fluorescence markers in modern laser scanning microscopes, medical professionals can assess the extent of tumor-affected tissue with nanometer precision during surgery, helping to preserve surrounding healthy tissue. 

Fraunhofer IPMS offers comprehensive support for companies looking to integrate micro scanner technology into their medical devices. This includes: 

• Control algorithms for precise positioning of reflective mirror plates 

• Transfer of digital control to system electronics (FPGA or microcontroller) 

• Evaluation kits for testing modules in specific application scenarios 

The micro scanner modules can be configured as one- or two-dimensional tilting or translation mirrors, with both quasi-static and resonant beam positioning. The technology, manufactured using the proprietary AME75 process, ensures consistent performance across multiple applications. 

COMPAMED.com; Source: Fraunhofer Institute for Photonic Microsystems